The relationship between the Young's modulus and dry etching rate of polydimethylsiloxane (PDMS)
AUTHORS
Fitzgerald
MLMatthew L ,
Tsai
SSara ,
Bellan
LMLeon M ,
Sappington
RRebecca ,
Xu
YYaqiong ,
Li
DDeyu .
Biomedical microdevices. 2019 3 2; 21(1).
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- PMID: 30826983[PubMed].